Machine and plant building in the semiconductor industry is incredibly complex. Automation components must guarantee high system availability, precision and reproducibility. The ongoing decarbonization of industry requires the use of resources to be minimized by reducing production energy. Nitrogen is an important factor in increasing energy efficiency and reducing costs. With the N2 purge system, Festo has developed a sustainable solution that helps to use this noble gas efficiently. Processes can be optimized in a targeted manner and the quality of the semiconductors ensured. At the same time, electricity consumption is reduced, costs are lowered, and CO2 savings targets are achieved. Recognizing the various factors that affect operating costs is crucial for semiconductor manufacturers. Even small factors can have a big impact. Optimized plant maintenance, improved and energy-efficient processes, effective environmental management and strategic material management in procurement, storage and production can significantly reduce your company’s operating costs and thus maximize profitability and competitiveness. The key to success in the semiconductor industry is having a comprehensive view of all aspects that contribute to cost opti- mization and increasing yields throughout production. Up to 50,000 cubic meters of nitrogen consumption A semiconductor plant consumes large quantities of water, electricity, liquid chemicals and process gases. The most commonly used medium in the semiconductor manufacturing process is nitrogen (N2). It is used, among other things, to rinse transport containers for wafers, knows as FOUPs (Front Opening Unified Pods). They create a controlled, contamination-free environment when transporting wafers between workstations. Large fabs can consume up to 50,000 cubic meters of nitrogen per hour. N2 is produced in an on-site air separation plant using energy-intensive methods and supplied to the processes. Advantage of piezo technology By carefully analyzing the areas in which nitrogen is used, considerable savings can be achieved in a short space of time. Especially the dispensing of N2 for flushing the FOUPs offers great potential if the previous standard valve systems are replaced by N2 purge systems from Festo with closed-loop control and piezo technology. Compared to conventional valves, the features of piezoelectric purge valves are extremely precise dispensing, and at the same time extremely low power consumption. The nitrogen consumption of a large semiconductor plant and the associated energy consumption and carbon emissions can be significantly reduced with N2 purge systems from Festo. “Demand-based and precise dispensing of nitrogen offers a significant savings potential.” Tobias Glattbach, Global Industry Segment Manager Electronics, Festo You can find more information on automation in the semiconductor industry here: > www.festo.com/semicon Semicon N2 purge systems reduce nitrogen consumption
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